MEMS Si3N4 fiber-tip photoacoustic sensor with FIB peripheral micro-apertures achieves 58.5 ppb NEC (gas) and ~230 ppb NEC (oil) for C2H2 at ~1.5 nL volume.
Quartz -Enhanced Photoacoustic Spectroscopy,
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MEMS Fiber-Tip Photoacoustic Spectrometer for In Situ Microscale Trace Gas Sensing
MEMS Si3N4 fiber-tip photoacoustic sensor with FIB peripheral micro-apertures achieves 58.5 ppb NEC (gas) and ~230 ppb NEC (oil) for C2H2 at ~1.5 nL volume.