Wafer-scale 2-inch beta-Ga2O3 MOSFETs fabricated with >3 kV breakdown and reported uniformity in threshold voltage, current density, and breakdown across the wafer.
10- kV Lateral β-Ga2O3 MESFETs With B Ion Implanted Planar Isolation,
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Wafer-scale Demonstration of High-voltage beta-Ga2O3 MOSFETs with Excellent Uniformity and over 3kV Breakdown Voltages
Wafer-scale 2-inch beta-Ga2O3 MOSFETs fabricated with >3 kV breakdown and reported uniformity in threshold voltage, current density, and breakdown across the wafer.