A physics-constrained neural network predicts SALD coverage in milliseconds from 30 CFD cases, and an analytic slope law diagnoses when fitted adsorption energies are not separately identifiable.
Poodt et al., Spatial atomic layer deposition: a route towards further industrialization,J
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A Physics-Chemistry-Informed Neural Network (PCINN) for Real-Time Spatial-ALD Coverage Prediction and Reliable Kinetics Inversion
A physics-constrained neural network predicts SALD coverage in milliseconds from 30 CFD cases, and an analytic slope law diagnoses when fitted adsorption energies are not separately identifiable.