EBSD lateral resolution in magnesium reaches 240 nm at 5 kV but degrades to 3500 nm at 30 kV with aspect ratio rising to 2.5, while tungsten shows stable resolution near 60 nm across voltages.
Field, Recent advances in the application of orientation imaging, Ultramicroscopy
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On the spatial resolution of EBSD in magnesium
EBSD lateral resolution in magnesium reaches 240 nm at 5 kV but degrades to 3500 nm at 30 kV with aspect ratio rising to 2.5, while tungsten shows stable resolution near 60 nm across voltages.