Feedback-controlled laser ablation with white-light monitoring and in-situ calibration produces micromirror templates with tunable curvature and 3% geometric variance, verified by a 37000-finesse Fabry-Perot cavity at telecom wavelengths.
This calibration was performed by ablat- ing at different axial offsets relative to the IR laser focus and selecting the offset that minimized fea- ture asymmetry
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High-yield fabrication of micromirror templates via feedback-controlled laser ablation
Feedback-controlled laser ablation with white-light monitoring and in-situ calibration produces micromirror templates with tunable curvature and 3% geometric variance, verified by a 37000-finesse Fabry-Perot cavity at telecom wavelengths.