A CWT plus Siamese VGG-16 pipeline separates synthetically induced time-shift and amplitude-shift anomalies from normal semiconductor tool traces with reported 99-100% accuracy.
URL: https://www.machinedesign.com/mechanical-motion-systems/article/21837100/ error-in-measuring-low-flows-could-cost-chipmakers-millions
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Continuous Wavelet Transform and Siamese Network-Based Anomaly Detection in Multi-variate Semiconductor Process Time Series
A CWT plus Siamese VGG-16 pipeline separates synthetically induced time-shift and amplitude-shift anomalies from normal semiconductor tool traces with reported 99-100% accuracy.