Gradient residual stress in transferred thin-film lithium niobate varies with orientation and thickness and can be partially compensated by a periodically poled piezoelectric bilayer.
Residual Stress Anisotropy in Thin -Film Lithium Niobate for Stress -Managed Mems
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Gradient Residual Stress in Transferred Thin-Film Lithium Niobate and Its Compenstation Using Periodically Poled Piezoelectric Bilayers
Gradient residual stress in transferred thin-film lithium niobate varies with orientation and thickness and can be partially compensated by a periodically poled piezoelectric bilayer.