An integrated optomechanical sensor with a suspended SiO2 membrane and high-Q Si3N4 microring reaches nano-Pascal-level noise-equivalent pressure, the best reported for integrated microcavity ultrasound detectors.
Commun.7, 12316 (2016)
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Integrated optomechanical ultrasonic sensors with nano-Pascal-level sensitivity
An integrated optomechanical sensor with a suspended SiO2 membrane and high-Q Si3N4 microring reaches nano-Pascal-level noise-equivalent pressure, the best reported for integrated microcavity ultrasound detectors.