A flexible quasi-BIC terahertz metasurface on a cyclic olefin copolymer substrate detects a 7 nm germanium overlayer through amplitude and phase difference signals.
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Terahertz sensing of 7nm dielectric film with bound states in the continuum metasurfaces
A flexible quasi-BIC terahertz metasurface on a cyclic olefin copolymer substrate detects a 7 nm germanium overlayer through amplitude and phase difference signals.