For a nominal 52 μm production film, FFT thickness extraction is highly repeatable but biased by 0.62 μm versus WLI, while the zero-crossing LRZ method reduces the error to 0.20 μm.
Title resolution pending
1 Pith paper cite this work. Polarity classification is still indexing.
1
Pith paper citing it
fields
physics.optics 1years
2026 1verdicts
CONDITIONAL 1representative citing papers
citing papers explorer
-
Practical Evaluation of FFT-Based Thickness Extraction for Thick-Film Reflectometry
For a nominal 52 μm production film, FFT thickness extraction is highly repeatable but biased by 0.62 μm versus WLI, while the zero-crossing LRZ method reduces the error to 0.20 μm.