Developed pre-ionized pulsed magnetron discharges in the 1-50 μs range for ionized PVD, achieving high ion flux ratios, arc-free regime, and operation over wide pressure and current density ranges.
Magnetron sputtering: a review of recent developments and applications
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High power fast pulsed magnetron discharges
Developed pre-ionized pulsed magnetron discharges in the 1-50 μs range for ionized PVD, achieving high ion flux ratios, arc-free regime, and operation over wide pressure and current density ranges.