Domain-specialized small language models enable deterministic atomic-resolution scanning probe microscopy control with 99.3% command accuracy, lower computational cost, and better domain performance than larger general models.
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Integrating Domain-Specialized Language Models with AI Measurement Tools for Deterministic Atomic-Resolution Experimentation
Domain-specialized small language models enable deterministic atomic-resolution scanning probe microscopy control with 99.3% command accuracy, lower computational cost, and better domain performance than larger general models.