Parametric OpInf learns and interpolates reduced-order models from CFD data for PECVD purging flow, reporting 9.32% max error on unseen parameters and 142x speedup.
Backside defect monitoring strategy and improvement in the advanced semiconductor manufacturing,
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Parametric Operator Inference to Simulate the Purging Process in Semiconductor Manufacturing
Parametric OpInf learns and interpolates reduced-order models from CFD data for PECVD purging flow, reporting 9.32% max error on unseen parameters and 142x speedup.