An LLM-based planning agent using ReAct, retrieval tools, and RAG can autonomously answer semiconductor failure analysis queries in an industrial setting, with best average quality 3.6/5.
Towards an fa chatbot with retrieval- augmented language modeling,
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Intelligent Assistants for the Semiconductor Failure Analysis with LLM-Based Planning Agents
An LLM-based planning agent using ReAct, retrieval tools, and RAG can autonomously answer semiconductor failure analysis queries in an industrial setting, with best average quality 3.6/5.