On-chip spiral inductors built by shunting CMOS metal layers in parallel measured above 250 nH and powered 30 MHz open-loop buck converters at 69.1% peak efficiency under light load.
A fully-integrated 0.18 μm CMOS DC - DC step-down converter, using a bondwire sp iral inductor,
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Investigation of On-Chip Inductors for Fully Integrated DC-DC Converters
On-chip spiral inductors built by shunting CMOS metal layers in parallel measured above 250 nH and powered 30 MHz open-loop buck converters at 69.1% peak efficiency under light load.