Thermal reconstruction of sapphire substrates via CO2 laser annealing enables growth of more crystalline TiN films for superconducting resonators without chemical cleaning, achieving similar device performance.
Height profiles along indicated paths are shown underneath each AFM topograph with the calculated RMS roughness noted for each substrate
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Thermal reconstruction as a method of substrate preparation for highly crystalline superconducting TiN resonators
Thermal reconstruction of sapphire substrates via CO2 laser annealing enables growth of more crystalline TiN films for superconducting resonators without chemical cleaning, achieving similar device performance.