A portable grating-CCD spectrometer with Y-fiber optics is presented and used for spectrum, concentration, and film-thickness measurements, with claims of 1 nm resolution and ±1.25 μm film accuracy.
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Multifunctional Portable Optical Measuring Instrument Based on Y-Fiber Optics
A portable grating-CCD spectrometer with Y-fiber optics is presented and used for spectrum, concentration, and film-thickness measurements, with claims of 1 nm resolution and ±1.25 μm film accuracy.