ALD-deposited niobium nitride films produce microwave resonators with internal quality factors above 10^6 for a substantial fraction of devices, with critical temperatures up to 10.9 K.
Linzen et al., Superconductor Science and Technology 30, 035010 (2017)
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Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
ALD-deposited niobium nitride films produce microwave resonators with internal quality factors above 10^6 for a substantial fraction of devices, with critical temperatures up to 10.9 K.