Graded silicon beam lattices with tens of thousands of unit cells are inversely designed with ray tracing and fabricated by wafer-scale photolithography, guiding MHz elastic waves along a designed figure-eight path.
, author Degertekin, F
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Graded phononic metamaterials: Scalable design meets scalable microfabrication
Graded silicon beam lattices with tens of thousands of unit cells are inversely designed with ray tracing and fabricated by wafer-scale photolithography, guiding MHz elastic waves along a designed figure-eight path.