Demonstrates sub-wavelength through-holes in LiNbO3 Lamb-wave resonators to reduce suspension area and standardize etching while preserving frequency, coupling, and Q factor.
4.5 GHz Lithium Niobate MEMS Filters With 10% Fractional Bandwidth for 5G Front-Ends,
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K-band LiNbO3 A3 Lamb-wave Resonators with Sub-wavelength Through-holes
Demonstrates sub-wavelength through-holes in LiNbO3 Lamb-wave resonators to reduce suspension area and standardize etching while preserving frequency, coupling, and Q factor.