SEMU-Net uses U-Net based models to segment SEM images of nanophotonic devices and to correct GDS layout files against fabrication-induced variations, reporting 99.30% and 98.67% IoU respectively.
Brown, Benjamin Mann, et al
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SEMU-Net: A Segmentation-based Corrector for Fabrication Process Variations of Nanophotonics with Microscopic Images
SEMU-Net uses U-Net based models to segment SEM images of nanophotonic devices and to correct GDS layout files against fabrication-induced variations, reporting 99.30% and 98.67% IoU respectively.