A stacked vertical complementary FeRAM using all-ALD HfO2 cells achieves effective 2Pr >100 uC/cm² and >10^10 endurance via differential polarization readout.
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Fully Atomic-Layer-Deposited Vertical Complementary FeRAM with Ultra-High 2Pr > 100 uC/cm2 and High Endurance > 1E10 cycles
A stacked vertical complementary FeRAM using all-ALD HfO2 cells achieves effective 2Pr >100 uC/cm² and >10^10 endurance via differential polarization readout.