A thin suspended AlN microbolometer achieves narrowband VLWIR detection with peak responsivity of 920.8 ppm/mW at 15.48 μm by leveraging phonon resonance and reduced thermal mass.
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physics.optics 1years
2026 1verdicts
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Thin Film AlN Microbolometer for Very Long-Wave Infrared Detection
A thin suspended AlN microbolometer achieves narrowband VLWIR detection with peak responsivity of 920.8 ppm/mW at 15.48 μm by leveraging phonon resonance and reduced thermal mass.