A detailed AlN-on-sapphire waveguide fabrication process combining shape-PEC electron beam lithography, a single ALD Al2O3 passivation layer, and a 400 °C rapid thermal anneal reaches 2.0 ± 0.3 dB/cm loss at 852 nm.
Technologies for Modulation of Visible Light and their Applications
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abstract
Control over the amplitude, phase, and spatial distribution of visible-spectrum light underlies many technologies, but commercial solutions remain bulky, require high control power, and are often too slow. Active integrated photonics for visible light promises a solution, especially with recent materials and fabrication advances. In this review, we discuss three growing application spaces which rely on control of visible light: control and measurement of atomic quantum technologies, augmented-reality displays, and measurement and control of biological systems. We then review the commercial dynamic surfaces and bulk systems which currently provide visible-light modulation and the current state-of-the-art integrated solutions. Throughout the review we focus on speed, control power, size, optical bandwidth, and technological maturity when comparing technologies.
fields
physics.optics 1years
2025 1verdicts
CONDITIONAL 1representative citing papers
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Low Loss Aluminum Nitride Waveguide Fabrication: Propagation Loss Reduction Through ALD and RTA
A detailed AlN-on-sapphire waveguide fabrication process combining shape-PEC electron beam lithography, a single ALD Al2O3 passivation layer, and a 400 °C rapid thermal anneal reaches 2.0 ± 0.3 dB/cm loss at 852 nm.