A bibliometric scoping review finds a structural disconnect between AI-driven semiconductor process optimization and ESG/sustainability governance, and proposes a six-layer SSbD architecture to bridge it.
Research quality evaluation by A I in the era of large language models: advantages, disadvantages, and systemic effects – an opinion paper,
1 Pith paper cite this work, alongside 15 external citations. Polarity classification is still indexing.
1
Pith paper citing it
15
external citations · OpenAlex
fields
cs.SI 1years
2026 1verdicts
CONDITIONAL 1representative citing papers
citing papers explorer
-
Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD)
A bibliometric scoping review finds a structural disconnect between AI-driven semiconductor process optimization and ESG/sustainability governance, and proposes a six-layer SSbD architecture to bridge it.