Tracing boron diffusion into a textured silicon solar cell using electron beam induced current in a scanning transmission electron microscope

The light absorption of [001] grown single-crystalline silicon wafers can be enhanced by chemical etching, e.g., with potassium hydroxide, resulting in a pyramid-like surface texture. Alongside advantageous photon harvesting in solar cells, the surface roughness leads to drawbacks when measuring diffusion behaviour of dopants in the heterogeneous structure. In this paper, we employ experimental and simulated scanning transmission electron beam induced current in combination with simulation of boron diffusion in a self-consistent framework to trace the dopant distribution underneath the pyramid-like surface texture. In order to account for surface recombination, an effective model projecting the system along the electron beam propagation direction is used in the EBIC simulation enabling a comparison to entire two-dimensional experimental maps. We find a good agreement between simulated and experimental data and thoroughly discuss how EBIC can be used in future experiments to quantify weak electric fields.