High-resistivity silicon shows the highest thermal conductivity at 300 mK among tested substrates, and Nb routing lines increase in-plane conductance but leave the substrate as the dominant heat path.
Datta,Quantum Transport: Atom to Transistor(Cambridge University Press, 2005)
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Sub-kelvin thermal conductivity of substrates and on-chip routing in quantum integrated systems
High-resistivity silicon shows the highest thermal conductivity at 300 mK among tested substrates, and Nb routing lines increase in-plane conductance but leave the substrate as the dominant heat path.