Demonstrates sub-wavelength through-holes in LiNbO3 Lamb-wave resonators to reduce suspension area and standardize etching while preserving frequency, coupling, and Q factor.
Miniaturized High- Selectivity High-Resistivity-Silicon IPD Bandpass Filter Based on Multiple Transmission Paths,
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K-band LiNbO3 A3 Lamb-wave Resonators with Sub-wavelength Through-holes
Demonstrates sub-wavelength through-holes in LiNbO3 Lamb-wave resonators to reduce suspension area and standardize etching while preserving frequency, coupling, and Q factor.