Combining reflection and transmission SR-XRT with contrast size, invisibility criteria, and linewidth analysis allows complete Burgers vector determination for edge, mixed, and screw threading dislocations in GaN substrates.
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Comprehensive determination of Burgers vectors of threading dislocations in GaN substrates by combining reflection and transmission synchrotron-radiation x-ray topography
Combining reflection and transmission SR-XRT with contrast size, invisibility criteria, and linewidth analysis allows complete Burgers vector determination for edge, mixed, and screw threading dislocations in GaN substrates.