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Introduction Lithography is a crucial process in semiconductor manufacturing, responsible for transferring intricate patterns from a photomask onto a substrate, typically a silicon

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Fast inverse lithography based on a model-driven block stacking convolutional neural network

physics.optics · 2024-12-19 · conditional · novelty 4.0

A physics-driven U-net++ that outputs masks as stacks of rectangular blocks shows lower mask-writing shot counts with modest pattern-error increase.

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Fast inverse lithography based on a model-driven block stacking convolutional neural network physics.optics · 2024-12-19 · conditional · none · ref 1
A physics-driven U-net++ that outputs masks as stacks of rectangular blocks shows lower mask-writing shot counts with modest pattern-error increase.

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