Parametric OpInf learns and interpolates reduced-order models from CFD data for PECVD purging flow, reporting 9.32% max error on unseen parameters and 142x speedup.
Detection and identification of particles on silicon wafers based on light scattering and absorption spectroscopy and machine learning,
1 Pith paper cite this work. Polarity classification is still indexing.
1
Pith paper citing it
fields
math.NA 1years
2025 1verdicts
UNVERDICTED 1representative citing papers
citing papers explorer
-
Parametric Operator Inference to Simulate the Purging Process in Semiconductor Manufacturing
Parametric OpInf learns and interpolates reduced-order models from CFD data for PECVD purging flow, reporting 9.32% max error on unseen parameters and 142x speedup.