A fully convolutional network trained separately on WLI and AFM data predicts full-chip post-CMP nanotopography at nanometer accuracy.
FEOL CMP mode- ling: Progress and challenges
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Full-chip CMP modelling based on Fully Convolutional Network leveraging White Light Interferometry
A fully convolutional network trained separately on WLI and AFM data predicts full-chip post-CMP nanotopography at nanometer accuracy.