A bimorph lithium niobate PMUT reaches 775 kHz with Q of 200, 6.4% k2, 65 nm/V transmit efficiency, and stable performance to 600°C with survival to 900°C.
Erratum: Piezoelectric coefficients and spontaneous polarization of ScAlN (2015J. Phys. Condens. Matter27 245901),
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Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducers
A bimorph lithium niobate PMUT reaches 775 kHz with Q of 200, 6.4% k2, 65 nm/V transmit efficiency, and stable performance to 600°C with survival to 900°C.