SNMM method extended from single to multiple layers, reducing 3D EM problems in layered structures to series of 2D eigenvalue problems for metasurface and lithography simulations.
Numerical mode matching method with perfectly matching layer,
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2019 1verdicts
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Spectral Numerical Mode Matching Method for 3D Layered Multi-Region Structures
SNMM method extended from single to multiple layers, reducing 3D EM problems in layered structures to series of 2D eigenvalue problems for metasurface and lithography simulations.