A grounded-ring electrode in lithium niobate creates a spurious-free thickness-extensional BAW resonator operating at 10.14 MHz with 29.6% electromechanical coupling and maximum Q of 5230.
High- Figure-of-Merit X-Cut Lithium Niobate MEMS Resonators Operating Around 50 MHz for Large Passive V oltage Amplification in Radio Frequency Applications,
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Spurious-Free Lithium Niobate Bulk Acoustic Wave Resonator with Grounded-Ring Electrode
A grounded-ring electrode in lithium niobate creates a spurious-free thickness-extensional BAW resonator operating at 10.14 MHz with 29.6% electromechanical coupling and maximum Q of 5230.