RF-sputtered SrTiO3 films on Pt(111)/Al2O3 achieve (111) texture with 0.2° rocking curve FWHM and ~110 pm RMS roughness when grown on low-power (90 W) Pt templates.
Structure and dielectric properties of STO films prepared by pulsed laser deposition technique,
1 Pith paper cite this work. Polarity classification is still indexing.
1
Pith paper citing it
fields
cond-mat.mtrl-sci 1years
2026 1verdicts
CONDITIONAL 1representative citing papers
citing papers explorer
-
Growth of (111)-textured SrTiO3 thin films on Pt(111)/Al2O3(1-102) substrates by rf magnetron sputter deposition
RF-sputtered SrTiO3 films on Pt(111)/Al2O3 achieve (111) texture with 0.2° rocking curve FWHM and ~110 pm RMS roughness when grown on low-power (90 W) Pt templates.