A bimorph lithium niobate PMUT reaches 775 kHz with Q of 200, 6.4% k2, 65 nm/V transmit efficiency, and stable performance to 600°C with survival to 900°C.
Direct Wafer Bonding of 128° Y-Cut LiNbO3: A Pathway to High Frequency (50 GHz) Filter Applications,
1 Pith paper cite this work. Polarity classification is still indexing.
1
Pith paper citing it
fields
cond-mat.mtrl-sci 1years
2025 1verdicts
UNVERDICTED 1representative citing papers
citing papers explorer
-
Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducers
A bimorph lithium niobate PMUT reaches 775 kHz with Q of 200, 6.4% k2, 65 nm/V transmit efficiency, and stable performance to 600°C with survival to 900°C.