Confocal subsurface backscattering microscopy detects and classifies nanoscale threading dislocations in SiC substrates via confocal dark-field filtering and photoelastic scattering from strain-induced index perturbations.
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2 Pith papers cite this work. Polarity classification is still indexing.
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Pith papers citing it
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physics.optics 2years
2026 2verdicts
UNVERDICTED 2representative citing papers
Plasma etch recipe produces photonic-grade diamond-on-insulator films from bonded SCD membranes and enables 5 nm resolution thickness mapping via colorimetry on standard microscope images.
citing papers explorer
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Confocal Subsurface Backscattering Microscopy for Optical Identification of Nanoscale Threading Dislocations in SiC Substrates
Confocal subsurface backscattering microscopy detects and classifies nanoscale threading dislocations in SiC substrates via confocal dark-field filtering and photoelastic scattering from strain-induced index perturbations.
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Plasma Etch Process Optimization for Photonic-Grade Diamond-on-Insulator Substrates and Thickness Evaluation using Colorimetry
Plasma etch recipe produces photonic-grade diamond-on-insulator films from bonded SCD membranes and enables 5 nm resolution thickness mapping via colorimetry on standard microscope images.