A frequency-quadrupled titanium-sapphire laser with two cavity-enhanced stages reaches a record 130 mW of continuous-wave power at 213.6 nm, stable for hours.
Brueck, Optical and interferometric lithography - nan- otechnology enablers, Proceedings of the IEEE93, 1704 (2005)
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A tunable, continuous-wave 130-mW laser at 213 nm
A frequency-quadrupled titanium-sapphire laser with two cavity-enhanced stages reaches a record 130 mW of continuous-wave power at 213.6 nm, stable for hours.