A physics-constrained neural network predicts SALD coverage in milliseconds from 30 CFD cases, and an analytic slope law diagnoses when fitted adsorption energies are not separately identifiable.
Title resolution pending
1 Pith paper cite this work. Polarity classification is still indexing.
1
Pith paper citing it
fields
cs.LG 1years
2026 1verdicts
CONDITIONAL 1representative citing papers
citing papers explorer
-
A Physics-Chemistry-Informed Neural Network (PCINN) for Real-Time Spatial-ALD Coverage Prediction and Reliable Kinetics Inversion
A physics-constrained neural network predicts SALD coverage in milliseconds from 30 CFD cases, and an analytic slope law diagnoses when fitted adsorption energies are not separately identifiable.