A 4B-parameter vision-language model trained on rubric-guided synthetic wafer defect data reaches 6.493 LLM-Judge score, nearly matching Gemini-3-Flash at 7.149 for on-premise industrial use.
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WaferSAGE: Large Language Model-Powered Wafer Defect Analysis via Synthetic Data Generation and Rubric-Guided Reinforcement Learning
A 4B-parameter vision-language model trained on rubric-guided synthetic wafer defect data reaches 6.493 LLM-Judge score, nearly matching Gemini-3-Flash at 7.149 for on-premise industrial use.