Subwavelength metamaterial waveguide phase shifter achieves phase error below ±1.7° over 400 nm bandwidth from 1.35 to 1.75 μm with improved fabrication robustness.
Compact single-mode silicon hybrid rib/strip waveguide with adiabatic bends
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Ultra-broadband nanophotonic phase shifter based on subwavelength metamaterial waveguides
Subwavelength metamaterial waveguide phase shifter achieves phase error below ±1.7° over 400 nm bandwidth from 1.35 to 1.75 μm with improved fabrication robustness.