Developed pre-ionized pulsed magnetron discharges in the 1-50 μs range for ionized PVD, achieving high ion flux ratios, arc-free regime, and operation over wide pressure and current density ranges.
New Elemental and Molecular De pth Profiling Analysis of Advanced Materials by Modulated Radio Frequency Glow Discharge Time of Flight Mass Spectrometry
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High power fast pulsed magnetron discharges
Developed pre-ionized pulsed magnetron discharges in the 1-50 μs range for ionized PVD, achieving high ion flux ratios, arc-free regime, and operation over wide pressure and current density ranges.