A photo-lithographic pinhole mask is accurate to 47 nm RMS, and calibrating it with rotations can meet the few-nanometer requirements of TMT-class astrometry.
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Geometric Distortion Calibration with Photo-lithographic Pinhole Masks for High-Precision Astrometry
A photo-lithographic pinhole mask is accurate to 47 nm RMS, and calibrating it with rotations can meet the few-nanometer requirements of TMT-class astrometry.