Thin-film lithium niobate shows thickness-dependent in-plane stress anisotropy with stress-free orientations near 55°/125° for 220-460 nm films and 20°/160° for 100 nm films, enabling 2 cm long suspended beams.
Determining mean a nd gradient residual stresses in thin films using micromachined cantilevers
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Residual Stress Anisotropy In Thin-Film Lithium Niobate For Stress-Managed MEMS
Thin-film lithium niobate shows thickness-dependent in-plane stress anisotropy with stress-free orientations near 55°/125° for 220-460 nm films and 20°/160° for 100 nm films, enabling 2 cm long suspended beams.