EBSD lateral resolution in magnesium reaches 240 nm at 5 kV but degrades to 3500 nm at 30 kV with aspect ratio rising to 2.5, while tungsten shows stable resolution near 60 nm across voltages.
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On the spatial resolution of EBSD in magnesium
EBSD lateral resolution in magnesium reaches 240 nm at 5 kV but degrades to 3500 nm at 30 kV with aspect ratio rising to 2.5, while tungsten shows stable resolution near 60 nm across voltages.