RF magnetron sputtering degrades AgNW networks but mitigation via buffer layers and optimized conditions like lower power and controlled oxygen pressure enables reliable oxide coatings.
Depla, The measurement and impact of negative oxy- gen ions during reactive sputter deposition, Critical Re- views in Solid State and Materials Sciences49, 718 (2024)
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Challenges and mitigation pathways in coating silver nanowire networks with metallic oxides by RF magnetron sputtering
RF magnetron sputtering degrades AgNW networks but mitigation via buffer layers and optimized conditions like lower power and controlled oxygen pressure enables reliable oxide coatings.