Transmission measurement at 10.6 microns of Te2As3Se5 rib-waveguides on As2S3 substrate

The feasibility of chalcogenide rib waveguides working at lambda = 10.6 microns has been demonstrated. The waveguides comprised a several microns thick Te2As3Se5 film deposited by thermal evaporation on a polished As2S3 glass substrate and further etched by physical etching in Ar or CF4/O2 atmosphere. Output images at 10.6 microns and some propagation losses roughly estimated at 10dB/cm proved that the obtained structures behaved as channel waveguides with a good lateral confinement of the light. The work opens the doors to the realisation of components able to work in the mid and thermal infrared up to 20 microns and even more.