Set-up and characterization of a humidity sensor realized in LTCC-technology

A new type of integrated temperature and humidity sensor applying LTCC-technology has been developed and characterized. In this approach, sensing elements are implemented using heated metal resistors (Pt-elements), where one is exposed to the humid environment that causes the sensor element to cool down with increased humidity, while the other one is sealed from the environment. Sensor design is based on FEA (Finite Element Analyses) where the critical design parameters have been analyzed with regard to the performance characteristic of the device. The set-up of sensor element will be shown and the functional capability will be demonstrated by experimental results.