Deterministic integrated tuning of multi-cavity resonances and phase for slow-light in coupled photonic crystal cavities

We present the integrated chip-scale tuning of multiple photonic crystal cavities. The optimized implementation allows effective and precise tuning of multiple cavity resonances (up to ~1.60 nm/mW) and inter-cavity phase (~ 0.038 pi/mW) by direct local temperature tuning on silicon nanomembranes. Through designing the serpentine metal electrodes and careful electron-beam alignment to avoid cavity mode overlap, the coupled photonic crystal L3 cavities preserve their high quality factors. The deterministic resonance and phase control enables switching between the all-optical analogue of electromagnetically-induced-transparency (EIT) to flat-top filter lineshapes, with future applications of trapping photons/photonic transistors and optoelectronic modulators.